Solvent removal apparatus and method

Details Solvent removal apparatus and method Solvent removal apparatus and method

2008-04-08

2008-04-08

Gravini, S. (Department: 3749)

Drying and gas or vapor contact with solids

Process

With nondrying treating of material

C034S080000

Reexamination Certificate

active

11312970

ABSTRACT:
A solvent removal apparatus and method is provided that can dry a coat on a workpiece in a uniform thickness. The solvent removal apparatus includes a support base for supporting a substrate provided with a liquid phase film-forming coat containing a film material and a solvent, a gas introduction mechanism for introducing a solvent removal gas toward a center part of the substrate, and a flow restrictor for restricting flow of the solvent removal gas in such a manner that the gas can flow radially outward from the center part of the substrate toward a peripheral edge part thereof. The solvent is removed from the coat while restricting the flow of the gas with the flow restrictor.

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