Solution treatment unit

Details Solution treatment unit Solution treatment unit

2005-01-18

2005-01-18

Stinson, Frankie L. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

C134S095300, C134S099100, C134S104100, C134S186000, C134S902000

Reexamination Certificate

active

06843259

ABSTRACT:
The present invention relates to a solution treatment unit for supplying a treatment solution to a substrate to treat the substrate within a treatment container, and an inner container surrounding an outer periphery of the horizontally held substrate with its upper and lower faces open is provided in the treatment container. An exhaust pipe for exhausting an atmosphere in the treatment container is provided in a bottom portion of the treatment container and inside the inner container. An exhaust port of the exhaust pipe is open at a position higher than the bottom portion. A drain port for draining the treatment solution in the treatment container is provided in the bottom portion. According to the present invention, the drain of a solution and the exhaust of an atmosphere can be performed separately without being mixed, and hence pressure loss of a fan on the factory side which performs an exhaust operation can be reduced, resulting in a reduction in excess power consumption.

REFERENCES:
patent: 3990462 (1976-11-01), Elftmann et al.
patent: 4429983 (1984-02-01), Cortellino et al.
patent: 5908657 (1999-06-01), Kimura et al.
patent: 5937223 (1999-08-01), Akimoto et al.
patent: 6228561 (2001-05-01), Hasebe et al.
patent: 6267516 (2001-07-01), Nagamine et al.
patent: 6270576 (2001-08-01), Araki et al.
patent: 6432199 (2002-08-01), Takekuma
patent: 6494220 (2002-12-01), Matsuda et al.
patent: 6589338 (2003-07-01), Nakamori et al.
patent: 6612315 (2003-09-01), Pascal et al.
patent: 6652662 (2003-11-01), Ishihara et al.
patent: 4-139823 (1992-05-01), None
patent: 10-41270 (1998-02-01), None
patent: 2001-35828 (2001-02-01), None

Affiliated with

Also associated with

Rating

Solution treatment unit does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Solution treatment unit, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Solution treatment unit will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3437590