Solution for forming ferroelectric film and method for forming f

Compositions: coating or plastic – Coating or plastic compositions – Heavy metal compound containing

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10628719, C09K 300, C07C 6972

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active

060866659

ABSTRACT:
Acetylacetone and an aqueous nitric acid are included in a solution in which organic metal compounds of metals constituting a ferroelectric in an organic solvent thereby forming a ferroelectric film formation solution. The solution is applied to a substrate, followed by drying and baking to obtain a ferroelectric film. As a consequence, even when forming a ferroelectric film such as a PZT or PLZT film containing a II group element in the periodic table, a stable ferroelectric film formation solution which prevents neither crystallization nor gelation and is reduced in a change with time in the viscosity thereof can be obtained. A ferroelectric film which contains a II group element and has excellent ferroelectric properties can be thus produced with ease.

REFERENCES:
patent: 4908065 (1990-03-01), Tanitsu et al.
patent: 5393907 (1995-02-01), Hasimoto et al.
patent: 5753945 (1998-05-01), Chivukula et al.

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