Dispensing – Drip – leakage or waste catching or disposal
Patent
1992-09-16
1993-11-16
Shaver, Kevin P.
Dispensing
Drip, leakage or waste catching or disposal
118 52, 118302, 141 87, 141 90, 222148, 222420, 239112, B05B 1502, B65D 4718
Patent
active
052615669
ABSTRACT:
A thin-film coating apparatus for forming a metal oxide film or diffusion source film on the surfaces of materials to be treated. The apparatus includes a solution-dropping nozzle device including an inner tube adapted to cause a solution to flow down therethrough and an outer tube enclosing the inner tube. The inner wall of the outer tube is spaced from the outer wall of the inner tube so as to define a flow path therebetween, the flow path being adapted to supply a cleaning solution to the tip portion of the inner tube. Because the tip portion of the inner tube can be cleaned efficiently, any concentration or deposition of the dropping solution is prevented from occurring at the tip portion of the inner tube.
REFERENCES:
patent: 400358 (1889-03-01), Page
patent: 2874734 (1959-02-01), Luckock et al.
patent: 3211377 (1965-10-01), Brenner
patent: 3601162 (1971-08-01), Page
patent: 3740041 (1973-06-01), Jones
patent: 3756458 (1973-09-01), Fill
patent: 3764041 (1973-10-01), Noll
patent: 3791342 (1974-02-01), Boyer et al.
patent: 3869068 (1975-03-01), Chen
patent: 4350187 (1982-09-01), Trusselle et al.
patent: 4365585 (1982-12-01), Naylor et al.
patent: 4416213 (1983-11-01), Sakiya
patent: 4633804 (1987-01-01), Arii
patent: 4790262 (1988-12-01), Nakayama et al.
patent: 4867345 (1989-09-01), Nakayama
Burt Pamela S.
Carrier Joseph P.
Shaver Kevin P.
Tokyo Ohka Kogyo Co. Ltd.
Weiner Irving M.
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