Solid state transducer and method of making same

Details Solid state transducer and method of making same Solid state transducer and method of making same

1986-06-11

1988-11-08

Schor, Kenneth M.

Fishing, trapping, and vermin destroying

156648, 156655, 1566591, 156644, 156647, 437225, 29610SG, 29580, H01L 2102

Patent

active

047832371

ABSTRACT:
Folded cantilever structures and solid state force transducers using same are made by chemical etching of a semiconductive wafer. In the chemical etching process, an etch stop layer is provided on a wafer of semiconductive material. The etch stop layer is opened in a certain pre-determined pattern and etchant is introduced through the opening in the etch stop layer to produce substantial undercut etching of portions of the etch stop layer. The opening is patterned to define a support structure (frame) for the folded cantilever portion which is undercut. The etch is terminated such that one end of the undercut folded cantilever structure is supported from the frame and the other end terminates on a structure such as a mass that is supported from the frame by means of the folded cantilever structure.

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Peterson, K. E., "Dynamic Micromechanics on Silicon: Techniques and Devices"; IEEE Transactions on Electronic Devices, vol. ED-25, No. 10, pp. 1241-1250, 10/1978.

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