Solid state surface evaluation methods and devices

Details Solid state surface evaluation methods and devices Solid state surface evaluation methods and devices

1994-07-07

1996-07-09

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

25033907, 2503413, 2503411, 2503418, G01J 342

Patent

active

055346987

ABSTRACT:
Methods and devices for evaluating solid-state surface properties use infrared absorption of lattice vibration. These methods and devices are characterized by reflection spectrometry by injecting infrared rays from the reverse of the solids, placing a light transmissible solid-state sample in ways that its surface faces the plane reflex mirror on the interaction region formed by reflected infrared rays, or by injecting infrared rays from the rear of a sample or from the front thereof after upright installation of the light transmissible solid-state sample through a slit created across the plane reflex mirror or on the surface of plane reflex mirror. These methods and devices enable simplified and accurate reflection spectrometry of solid-surface properties, featuring an economical system configuration that dispenses with expensive prism, unlike the conventional ATR method.

REFERENCES:
patent: 3475615 (1969-10-01), Samuel
patent: 4511800 (1985-04-01), Harbeke et al.
patent: 4594509 (1986-06-01), Simon et al.
patent: 5077475 (1991-12-01), Moriya et al.
patent: 5321264 (1994-06-01), Kuwabara et al.
Olsen et al., "Infrared reflection spectroscopy of the SiO.sub.2 -silicon interface", pp. 1353-1358, Journal of Applied Physics, vol. 66, No. 3, Aug. 1, 1989.
Ling et al., "Multiple internal Reflection infrared spectroscopy of silicon surface structure and oxidation process at room temperature", pp. 3018-3022 Journal of Applied Physics, vol. 73, No. 6, Mar. 15, 1993.
Jakob et al., "Chemical etching of vicinal Si(111): Dependence of the surface structure and the hydrogen termination of the pH of the etching solutions", pp. 2897-2909 Journal of Chemical Physics, vol. 95, No. 4. Aug. 15, 1991.
Bermudez, "Infrared spectroscopic study of the chemisorption of CF.sub.3 species on silicon", pp. 3297-3299 Appl. Phys. 62, No. 25, Jun. 21, 1993.
Ohshima et al., "Novel Technique of Infrared Reflection Absorption Spectroscopy for Si Surface Study", pp. L1176-L1178, Journal of Applied Physics, vol. 32, Part 2, No. 8B, Aug. 15, 1993.

Affiliated with

Also associated with

Rating

Solid state surface evaluation methods and devices does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Solid state surface evaluation methods and devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Solid state surface evaluation methods and devices will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1868747