Wave transmission lines and networks – Automatically controlled systems – Impedance matching
Patent
1995-04-27
1995-12-05
Gensler, Paul
Wave transmission lines and networks
Automatically controlled systems
Impedance matching
334 55, 334 56, H03H 740
Patent
active
054732913
ABSTRACT:
A solid state automatic tuner is used in a plasma processing system for measuring and adjusting a voltage standing wave ratio of the system. The tuner has a switched variable inductor circuit controlled by an automatic control system coupled to an impedance matching circuit. The impedance matching circuit provides an intermediate impedance and matches an output impedance of an RF generator to the varying impedance of a plasma chamber. A variable inductor of the switched variable inductor is constructed as a transformer and allows different values of inductance to be switched in and out of a secondary winding of the transformer. FET switches control pin diodes permitting the different values of inductance to be switched in and out in steps. A VSWR comparator of the control system continuously compares a desired VSWR set point for the system to the current VSWR of the system. A sequence scanner controls the FET switches.
REFERENCES:
patent: 3906405 (1975-09-01), Kommrusch
patent: 4486722 (1984-12-01), Landt
patent: 4502028 (1985-02-01), Carl, Jr. et al.
patent: 4621242 (1986-11-01), Theall, Jr. et al.
patent: 4701732 (1987-10-01), Nestlerode
Brounley Associates, Inc.
Gensler Paul
Larson Herbert W.
Larson James E.
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