Measuring and testing – Navigation – Leeway incidence or side-slip
Patent
1989-05-23
1990-06-05
Goldstein, Herbert
Measuring and testing
Navigation
Leeway incidence or side-slip
7320425, 156633, 156649, 156651, 156657, 156662, 357 28, G01F 168, H01L 21302
Patent
active
049303473
ABSTRACT:
A solid state microanemometer with improved sensitivity and response time is micromachined out of a single deep level doped semiconductor crystal and includes four corner supports interconnected to four spanning members which form the resistor legs of a Wheatstone bridge. The bottom of the supports are electrostatically bonded to a glass plate, thus thermally isolating the resistor legs a predetermined distance above the top surface of the plate and electrically isolating the supports. Electrically conductive material deposited on the four corner supports provides electrical contacts which enable a voltage to be applied across the resistor legs. Preferably, an n.sup.+ material is diffused into the region of the crystal located beneath the electrically conductive material, and the exposed surfaces of the crystal are sealed with a passivation layer.
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Goldstein Herbert
University of Cincinnati
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