Solid state microanemometer

Details Solid state microanemometer Solid state microanemometer

1990-12-12

1993-08-03

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

257414, G01F 168

Patent

active

052318770

ABSTRACT:
A solid state microanemometer is micromachined from a crystal to a shape with four thick external sides that define an outer rectangle, four thin sections that define an inner rectangle and four diagonally directed branches interconnecting the corners of the outer rectangle to the inner rectangle. Four semiconductor resistors located on the four inner sections form a sensing bridge. Each external side has a pair of electrical contacts that are electrically interconnected, via conductive leads that extend along the diagonal branches and partially along the inner sections, to one of the semiconductor resistors. The physically connected semiconductor resistors and external sides form a rugged solid state device, while thermal and electrical isolation of the resistors from each other permits higher operating temperatures and improved fluid flow sensing capability.

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