Solid state microanemometer

Details Solid state microanemometer Solid state microanemometer

1998-07-01

2000-03-07

Oen, William

Measuring and testing

Volume or rate of flow

Thermal type

7320425, G01F 168

Patent

active

060325275

ABSTRACT:
A solid state microanemometer is micromachined from a bonded silicon wafer comprising two silicon layers. The microanemometer comprises a first semiconductor wafer doped with an impurity having an upper planar surface and a lower planar surface with a peripheral edge; and a second semiconductor wafer bonded to the first semiconductor wafer having an upper planar surface; a lower surface; and a cavity having a peripheral edge and a peripheral margin defined on the upper planar surface and bounded by the peripheral edge of the cavity wherein the lower planar surface of the first semiconductor is bonded to the peripheral margin of the cavity so as to at least partially close the cavity wherein 0.025 to 99% of the peripheral edge of the lower planar surface of the first semiconductor overlaps with the peripheral edge of the cavity.

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