Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Charge transfer device
Patent
1991-07-18
1994-05-17
Hille, Rolf
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Charge transfer device
257233, 257222, 257223, 257241, H01L 2978, H01L 3100, G11C 1928
Patent
active
053130812
ABSTRACT:
There is provided a solid-state imaging device suitable for miniaturization. This solid-state imaging device comprises: a photosensitive element array in which photosensitive element trains are arranged in parallel with a predetermined spacing therebetween, each photosensitive element train being such that a plurality of photosensitive elements at least partially isolated from each other by device isolation layers are arranged in a train form; charge transfer sections each including charge transfer channel layers and a plurality of transfer electrodes in an interline form thereabove, arranged between the respective photosensitive element trains, and isolated from at least a portion adjacent to the photosensitive element array by the device isolation layers; channel regions formed in the regions between the photosensitive elements serving as the photosensitive element trains in a manner that they are adjacent to the device isolation layers and are connected to the charge transfer channel layers, and interconnection layers for connecting the electrodes in phase of the transfer electrodes provided above the device isolation layers and the channel regions, to control voltages applied to the transfer electrodes and the transfer electrode of the charge transfer section, thereby permitting each channel region between photosensitive elements to be used as a charge transport channel for transporting signal charges produced in the photosensitive elements to the charge transfer channel.
REFERENCES:
patent: 4291239 (1981-09-01), Weimer
patent: 4622567 (1986-11-01), Pals et al.
patent: 4663771 (1987-05-01), Takeshita et al.
patent: 4805026 (1989-02-01), Oda
patent: 4851887 (1989-07-01), Hagiwara
patent: 4907050 (1990-03-01), Yamada
patent: 4962412 (1990-10-01), Shinohara et al.
patent: 5040038 (1991-08-01), Yutani et al.
patent: 5111263 (1992-05-01), Stevens
Hille Rolf
Kabushiki Kaisha Toshiba
Saddat Mahshid
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