Solid-state imaging device with high pixel count that...

Television – Camera – system and detail – With single image scanning device supplying plural color...

Reexamination Certificate

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C250S208100, C257S431000

Reexamination Certificate

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07623166

ABSTRACT:
A solid-state imaging device is composed of a P-type semiconductor layer, an interlayer insulation film, a multilayer interference filter and condenser lenses which have been successively laminated on an N-type semiconductor layer. A photodiode, in which N-type impurities have been ion-implanted, is formed per pixel in the P-type semiconductor layer on the interlayer insulation film side. The multilayer interference filter has a composition including λ/4 multilayer films and a plurality of spacer layers sandwiched therebetween. The λ/4 multilayer films are composed of alternately laminated monotitanium dioxide layers and monosilicon dioxide layers that have the same optical thickness. The spacer layers have optical thicknesses corresponding to colors of light they are to transmit. A spacer layer is not included in a green region. Instead, two monotitanium dioxide layers, each of which constitutes a λ/4 multilayer film, are adjoined to make a monotitanium dioxide layer with an optical thickness of λ/2.

REFERENCES:
patent: 7416915 (2008-08-01), Kasano et al.
patent: 2005/0174664 (2005-08-01), Ito et al.
patent: 2006/0205107 (2006-09-01), Inaba et al.
Takao Ando, et al., “The Workings of an Electronic Eye,” Introduction to Solid-State Imaging Devices, Dec. 1999, pp. 183-188, Ed. Institute of Image Information and Television Engineers, Nihon Riko Shuppankai.

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