Solid state imaging device and method of manufacturing the same

Details Solid state imaging device and method of manufacturing the same Solid state imaging device and method of manufacturing the same

1998-01-22

2000-05-30

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

257233, 257294, 257432, H01L 310232

Patent

active

060693509

ABSTRACT:
In a solid state imaging device having light receiving sections arranged in horizontal and vertical directions with different pitches, an on-chip micro-lens having a focusing efficiency optimized in both horizontal and vertical directions is formed. The solid state imaging device comprises a plurality of light receiving sections (42) arranged in horizontal and vertical directions with different pitches, a foundation layer (47) formed over the light receiving sections (42) and having convex portions on portions between the light receiving sections (42) in a fine pitch direction and having concave portions at least along a straight line connecting centers of the light receiving sections in a coarse pitch direction, and a plurality of lenses (48) formed on the concave portions so as to at least partially overlap on the convex portions in correspondence with the light receiving sections (42).

REFERENCES:
patent: 5306926 (1994-04-01), Yonemoto
patent: 5324930 (1994-06-01), Jech, Jr.

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