Solid state imaging device and method for manufacturing the...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation

Reexamination Certificate

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C438S075000, C257S443000, C257S448000

Reexamination Certificate

active

06846695

ABSTRACT:
A solid-state imaging device of the present invention includes a vertical charge transfer portion and a horizontal charge transfer portion that is connected to at least one end of the vertical charge transfer portion. The vertical charge transfer portion includes a vertical transfer channel region and a plurality of vertical transfer electrodes formed on the vertical transfer channel region. The horizontal charge transfer portion includes a horizontal transfer channel region, a plurality of first horizontal transfer electrodes formed on the horizontal transfer channel region, and a plurality of second horizontal transfer electrodes arranged between the plurality of first horizontal transfer electrodes. A potential below the first horizontal transfer electrode is higher than a potential below the second horizontal transfer electrode that is arranged adjacent to the first horizontal transfer electrode and backward along a transfer direction with respect to the first horizontal transfer electrode. In the solid-state imaging device of the present invention, in a connection portion of the vertical charge transfer portion and the horizontal charge transfer portion, a distance between a final vertical transfer electrode arranged at a terminating end of the vertical charge transfer portion and the first horizontal transfer electrode in the horizontal charge transfer portion is equal to or smaller than a distance between the first horizontal transfer electrodes in the horizontal charge transfer portion.

REFERENCES:
patent: 5742081 (1998-04-01), Furumiya
patent: 5912482 (1999-06-01), Morimoto
patent: 6111279 (2000-08-01), Nakashiba
patent: 6194242 (2001-02-01), Uchiya
patent: 6472255 (2002-10-01), Hatano et al.
patent: 11-26749 (1999-01-01), None

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