Solid state imaging apparatus having a plurality of metal wiring

Details Solid state imaging apparatus having a plurality of metal wiring Solid state imaging apparatus having a plurality of metal wiring

1997-06-05

2000-08-01

Garber, Wendy

Television

Camera, system and detail

Solid-state image sensor

348317, 348322, 257229, 257232, H04N 314, H04N 5335

Patent

active

060974338

ABSTRACT:
Shunt wirings (12) in the form of a conductive light intercepting film which covers over vertical CCD registers and also serves to supply power, project into locations between adjacent photoelectric transducers (11) in the vertical direction, and the distance between the projecting portions of adjacent ones of the metal wirings is set to 0.2 .mu.m or less and is limited to a distance with which an electric field between adjacent ones of the metal wirings is 10.sup.7 V/cm or less and the adjacent metal wirings do not suffer from short-circuiting.

REFERENCES:
patent: 5194751 (1993-03-01), Yonemoto
patent: 5442396 (1995-08-01), Nakashiba
patent: 5537146 (1996-07-01), Tohyama
patent: 5796433 (1998-08-01), Dyck
"Optical Limitations to Cell Size Reduction in IT-CCD Image Sensors" Satoh et al.
IEEE International Electron Devices Meeting Technical Digest; Dec. 1995; pp. 159-162.

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