Solid state image pickup device and method for manufacturing the

Details Solid state image pickup device and method for manufacturing the Solid state image pickup device and method for manufacturing the

1997-12-31

2000-10-03

Le, Que T.

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

250216, 257292, 257294, H01J 4014

Patent

active

061276685

ABSTRACT:
A solid state image pickup device including implanting impurity ions into a planarizing layer and/or a microlens layer thereon for changing a refractive index thereof, and method for fabricating such a device. The planarizing layer and the microlens layer are formed over components of the solid state image pickup device including a plurality of photoelectric conversion regions and charge coupled device (CCD) regions, each charge coupled device transferring an image charge generated in the photoelectric conversion regions in one direction.

REFERENCES:
patent: 5306926 (1994-04-01), Yonemoto
patent: 5323052 (1994-06-01), Koyama
patent: 5854091 (1998-12-01), Back et al.

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