Television – Camera – system and detail – Solid-state image sensor
Reexamination Certificate
2007-09-25
2007-09-25
Ometz, David (Department: 2622)
Television
Camera, system and detail
Solid-state image sensor
C438S302000, C257S291000, C250S208100
Reexamination Certificate
active
10622540
ABSTRACT:
A method of manufacturing a MOS-type solid-state image pickup device having a photoelectric conversion unit, a transfer MOS transistor, a gate electrode disposed on an insulating film and a semiconductor substrate on which the photoelectric conversion unit and the transfer MOS transistor are disposed, includes a first step of forming a second semiconductor region by ion implanting an impurity of a second conductivity type at a first angle with a first energy using the gate electrode as a mask, and a second step of forming a fifth semiconductor region by ion implanting an impurity of the second conductivity type at a second angle with a second energy using the gate electrode as a mask. A fourth semiconductor region is formed by ion implanting an impurity of the second conductivity type. The second energy is smaller than the first energy, and the first and second angles are respectively angles to a direction normal to a surface of the semiconductor substrate, with the second angle being larger than the first angle, and the first and third steps being performed separately.
REFERENCES:
patent: 5245201 (1993-09-01), Kozuka et al.
patent: 5378641 (1995-01-01), Cheffings
patent: 5625210 (1997-04-01), Lee et al.
patent: 5675158 (1997-10-01), Lee
patent: 5872371 (1999-02-01), Guidash et al.
patent: 5880495 (1999-03-01), Chen
patent: 5881184 (1999-03-01), Guidash
patent: 5892253 (1999-04-01), Merrill
patent: 6023081 (2000-02-01), Drowley et al.
patent: 6107655 (2000-08-01), Guidash
patent: 6331873 (2001-12-01), Burke et al.
patent: 6528376 (2003-03-01), Guo
patent: 0738010 (1996-10-01), None
patent: 0809299 (1997-11-01), None
patent: 59-198756 (1984-11-01), None
patent: 8-335690 (1996-12-01), None
Lee et al., “An Active Pixel Sensor . . . Technology”, IEEE Workshop, 1995.
European Search Report, issued by the European Patent Office on Aug. 12, 2005, in European Patent Application No. 99302095.7.
Hiyama Hiroki
Kochi Tetsunobu
Koizumi Toru
Sakurai Katsuhito
Sugawa Shigetoshi
Ometz David
Tran Nhan
LandOfFree
Solid state image pickup device and manufacturing method... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Solid state image pickup device and manufacturing method..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Solid state image pickup device and manufacturing method... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3720887