Solid state image pick-up device and method for manufacturing th

Details Solid state image pick-up device and method for manufacturing th Solid state image pick-up device and method for manufacturing th

1997-06-27

1998-12-01

Munson, Gene M.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

257222, 257233, H01L 27148, H01L 29768, H01L 310232

Patent

active

058442901

ABSTRACT:
A solid state image pick-up device comprises an array of a plurality of photodiodes formed on a principal surface of a semiconductor substrate, a planarizing resin layer covering the principal surface of the semiconductor substrate, and a plurality of micro lens formed on the planarizing resin layer, each of micro lens being positioned to correspond to one of the photoelectric conversion elements. The planarizing resin layer is composed of a first region of a first refractive index sandwiched between each of the micro lens and the corresponding photodiode, and a second region surrounding the first region, the second region having a second refractive index larger than the first refractive index.

REFERENCES:
patent: 5323052 (1994-06-01), Koyama
patent: 5371397 (1994-12-01), Maegawa et al.
patent: 5691548 (1997-11-01), Akio
patent: 5739548 (1998-04-01), Shigeta et al.

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