Solid state gas pressure sensor

Details Solid state gas pressure sensor Solid state gas pressure sensor

1987-05-14

1989-03-14

Goldberg, E. A.

Electrical resistors

Strain gauge type

Fluid- or gas pressure-actuated

338 36, G01L 122

Patent

active

048128015

ABSTRACT:
A solid state gas pressure sensor has a resistor of polysilicon deposited upon a dielectric substrate which electrically isolates and thermally prevents heat transfer to other devices thereon. A constant voltage is applied to the resistor. Depending upon the gas pressure over the sensor, a given current will be output once temperature equilibrium is established. A change in the gas pressure changes the output current of the resistor. The output current indicative of pressure is temperature corrected.

REFERENCES:
patent: 3406572 (1968-10-01), Robillard
patent: 3513430 (1970-05-01), Heller
patent: 4019388 (1977-04-01), Hall, II et al.
patent: 4314225 (1982-02-01), Tominaga et al.
patent: 4430899 (1984-02-01), Wessel
patent: 4459856 (1984-07-01), Ko et al.
patent: 4558238 (1985-12-01), Yamada et al.
Fink and Christianson, "Transducers for Fluid-Mechanical Quantities", Electronics Engineers' Handbook, McGraw-Hill, NY, 1982, pp. 10-29 et al.

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