Electrical resistors – Resistance value responsive to a condition – Force-actuated
Patent
1976-02-09
1977-09-20
Albritton, C. L.
Electrical resistors
Resistance value responsive to a condition
Force-actuated
73517R, 73 885SD, 338 5, 357 26, H01L 1010
Patent
active
040500497
ABSTRACT:
Solid state folded leaf spring force transducers are fabricated by batch photolithographic and etching techniques from a monocrystalline material, such as silicon. The folded leaf spring structure includes elongated gaps separating adjacent leaf spring leg portions, such elongated gaps being oriented parallel to a crystallographic axis of the monocrystalline material. In a preferred embodiment the monocrystalline material is of diamond cubic type and the leaf spring gaps extend in mutually orthogonal directions parallel to the <011> and <011> crystallographic axes, respectively. In a preferred method of fabricating the spring structure, the structure is etched from a monocrystalline wafer by means of an anisotropic etchant so as to more precisely define angles and dimensions of the resultant spring structure. In one embodiment, the gaps between adjacent leg portions of the spring structure are sealed in a fluid tight manner by means of oxide membranes left intact upon etching of the spring structure. In an accelerometer embodiment, sensing masses of equal weight are affixed to opposite sides of the spring structure for dynamically balancing same.
REFERENCES:
patent: 3757414 (1973-09-01), Keller
patent: 3853650 (1974-12-01), Hartlaub
patent: 3858150 (1974-12-01), Gurtler et al.
patent: 3924322 (1975-12-01), Kurtz et al.
patent: 3938175 (1976-02-01), Jaffe et al.
patent: 3968466 (1976-07-01), Nakamura et al.
Albritton C. L.
Dana William H.
Pfeiffer C. Richard
Signetics Corporation
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