Solid state fluid flow sensor

Measuring and testing – Volume or rate of flow – Thermal type

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G01F 168

Patent

active

039929400

ABSTRACT:
A fluid flow sensor fabricated by integrated circuit techniques is positioned within fluid flow passages for measuring the mass flow of fluid therethrough. The sensor comprises three solid state circuit devices wherein two are fabricated on a chip separate from the third device.
The first device is responsive to forced convective heat transfer by the fluid flowing thereover for generating a first electrical signal. The third device is responsive to temperature of the fluid thereover for generating a second signal and the second device is responsive to both said first and second electrical signals for maintaining said first device at a predetermined temperature above said third device.
A fuel metering system for internal combustion engines is described utilizing a fluid flow sensor for measuring the mass flow of both fuel and air into the throttle body. Circuit means responsive to said sensors operate to maintain a predetermined fuel-air ratio in said internal combustion means.

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