Solid state differential pressure sensor with overpressure stop

Details Solid state differential pressure sensor with overpressure stop Solid state differential pressure sensor with overpressure stop

1988-10-20

1990-03-06

Garrett, Robert E.

Expansible chamber devices

Collapsible chamber wall portion

Wall portion formed of flexible material

92103R, 92 98R, 73718, 73721, 338 4, F01B 1900

Patent

active

049055755

ABSTRACT:
A solid state pressure sensor utilizes a brittle diaphragm made of a material such as silicon, which is mounted between base plates of glass, and which deflects in response to pressure. The base plates of glass can have recesses formed therein to receive the diaphragm and provide a full support across the diaphragm under overpressure conditions to prevent overstressing the diaphragm, or the diaphragm can have such contoured surfaces for forming overpressure stop surfaces against the facing base plate. The diaphragm has grooves defining a central portion that deflects, and whereby the grooves will form webs joining the central portion to an outer rim so that the diaphragm acts similarly to a "free edge" diaphragm in its deflection characteristics. The grooves defining the webs can have various configurations for achieving the results desired.

REFERENCES:
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patent: 4782319 (1988-11-01), Dell'Acqua et al.
patent: 4790192 (1988-12-01), Knecht et al.
patent: 4793194 (1988-12-01), Wilner
patent: 4802952 (1989-02-01), Kobori et al.
Miyata et al., "Si Diaphragm for Pressure Sensor", Jul. 23-25, 1986, Proceedings of SIC'86, pp. 559, 560.

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