Radiant energy – Ionic separation or analysis
Patent
1994-10-07
1996-06-25
Anderson, Bruce C.
Radiant energy
Ionic separation or analysis
250288, B01D 5544, H01J 4900
Patent
active
055302440
ABSTRACT:
A detector is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The detector is adapted to detect the filtering of an ionized sample of the gas. The detector includes a linear array of detector elements, each detector element being connected to a Faraday cage having v-shaped conductors. The Faraday cage is formed on a cavity provided in a semiconductor substrate upon which the solid state mass-spectrograph is constructed. The detector elements include signal generators located outside of the cavity and connected to the Faraday cage, and charge sensing means in the form of either a MOS switch or a charge-coupled device.
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Freidhoff Carl B.
Sriram Saptharish
Anderson Bruce C.
Northrop Grumman Corporation
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