Electrical audio signal processing systems and devices – Electro-acoustic audio transducer – Thermal response to – or generation of – sound vibration
Patent
1994-05-05
1996-02-06
Kuntz, Curtis
Electrical audio signal processing systems and devices
Electro-acoustic audio transducer
Thermal response to, or generation of, sound vibration
381173, 381113, 381191, H04R 2500
Patent
active
054902207
ABSTRACT:
A solid state miniature condenser and condenser microphone of good sensitivity is disclosed. The microphone comprises a fixed perforated backplate that constitutes a fixed electrode in a parallel plate condenser, a diaphragm sensitive to incident sound pressure waves that constitutes a moveable plate in the parallel plate condenser, keepers to position the diaphragm in relationship to the backplate without applying appreciable tension to the diaphragm, and FET circuitry which provides an output proportional to the change in capacitance of the condenser when the diaphragm moves in relationship to the backplate.
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D. Hohm and G. Hess, "A Subminiature Condenser Microphone with Silicon Nitride Membrane and Silicon Back Plate," J. Acoust. Soc. Am. 85(1), (Jan. 1989) pp. 476-480.
J. Bergqvist and F. Rudolf, "A Silicon Condenser Microphone with a Highly Perforated Backplate," Transducers '91--1991 Int'l Conf. on Solid State Sensors and Activators, IEEE (1991) pp. 266-269.
G. M. Sessler, "Acoustic Snesors," Sensors and Actuators A. 25-27 (1991) pp. 323-330 Technical University of Darmstadt, Darmstadt (F.R.G.).
Knowles Electronics, Inc.
Kuntz Curtis
Tran Sinh
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