Solid-state chemical sensor

Details Solid-state chemical sensor Solid-state chemical sensor

1998-06-05

1999-09-28

Bell, Bruce F.

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Means for analyzing gas sample

422 94, 422 98, 2057835, 205784, 2057845, 257204, 257253, 324439, 324443, 73 3106, G01N 2704

Patent

active

059583401

ABSTRACT:
The invention pertains to a solid-state chemical sensor with a substrate support. On one side of the support is mounted a heating element with branch circuit connections. On the other side interdigital electrodes are arranged and thereon a carbon dioxide-sensitive material, which comprises CuO and TiO.sub.3, as well as additional metal oxides, in the form of a thick film of approximately 20-200 .mu.m.

REFERENCES:
patent: 4045178 (1977-08-01), Okinaka et al.
patent: 4885929 (1989-12-01), Kasahara et al.
patent: 5457333 (1995-10-01), Fukui
patent: 5618496 (1997-04-01), Hasumi et al.
Yan, Beiping et al., "Gas-sensing properties of alfa-Fe203 thin films preed by plasma-enhanced chemical vapour deposition", Thin Solid Films, 245, 1994, pp. 225-227. No month available.

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