Solid organometallic compound-filled container and filling...

Details Solid organometallic compound-filled container and filling... Solid organometallic compound-filled container and filling...

2004-06-14

2009-06-16

Lund, Jeffrie R (Department: 1792)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C118S715000

Reexamination Certificate

active

07547363

ABSTRACT:
A solid organometallic compound novel filled container stably supplies an apparatus for vapor phase epitaxial growth such as an MOCVD apparatus with a solid organometallic compound over a long term. The solid organometallic compound-filled container has a carrier gas inlet and a carrier gas outlet. The interior of the filled container is separated into a plurality of vertical compartments. A carrier gas introduced via the carrier gas inlet flows through each of the vertical compartments and is then discharged via the carrier gas outlet.

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