Solid immersion lens optics assembly

Details Solid immersion lens optics assembly Solid immersion lens optics assembly

2009-06-17

2011-12-06

Ben, Loha (Department: 2873)

Optical: systems and elements

Lens

With support

C359S811000, C359S368000, C359S381000, C359S382000

Reexamination Certificate

active

08072699

ABSTRACT:
A solid immersion lens optics assembly, a test station for probing and testing of integrated circuits on a semiconductor wafer, and a method of landing a SIL on an object. The optics assembly comprises an objective lens housing for receiving an objective lens, and a solid immersion lens (SIL) housing for mounting an SIL and adapted for connection to the objective lens housing; wherein a peripheral wall of the SIL housing comprises an integrated spring section adapted to provide a biased support for the SIL.

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patent: 7639025 (2009-12-01), Hanson et al.
patent: 2010/0202041 (2010-08-01), Terada et al.

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