Solid immersion lens holder

Details Solid immersion lens holder Solid immersion lens holder

2006-01-18

2008-08-19

Thompson, Timothy J (Department: 2873)

Optical: systems and elements

Lens

With support

C359S819000

Reexamination Certificate

active

07414800

ABSTRACT:
A solid immersion lens holder8A is provided with a base part50attached to an objective lens21, and a lens holding part60provided with the base part50, extending in a direction of optical axis L of the objective lens21, and arranged to hold a solid immersion lens6at an end portion thereof. The lens holding part holds the solid immersion lens so that light emerging from the solid immersion lens to the base part side travels through a region outside the lens holding part and toward the base part, and the base part has a light passing portion53which transmits the light toward the objective lens. Since the lens holding part extends in the direction of the optical axis L of the objective lens, even in a case where an observation object11is observed as located on a bottom surface of recess13, the lens holding part will be prevented from contacting a side wall13aof the recess. As a result, it becomes feasible to observe the observation object up to a region closer to the vicinity of peripheral part11aof the observation object. This provides a solid immersion lens holder allowing observation up to a region closer to a peripheral part of an observation object even in a case where the observation object is set in a recess of a sample.

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