Solid immersion lens and sample observation method using it

Details Solid immersion lens and sample observation method using it Solid immersion lens and sample observation method using it

2006-12-12

2006-12-12

Mack, Ricky (Department: 2873)

Optical: systems and elements

Lens

Microscope objective

C359S661000, C359S664000, C359S368000

Reexamination Certificate

active

07149036

ABSTRACT:
Using a solid immersion lens (SIL) having a spherical lens surface with a radius of curvature RLfrom a material having a refractive index nL, an image of a sample is observed. A geometric aberration characteristic caused by the SIL is evaluated by using a predetermined optical system. Using a coefficient k (0<K<1) set to satisfy a condition where the average image surface becomes flat or a condition yielding a favorable chromatic aberration characteristic, the sample is observed with the solid immersion lens while a surface, orthogonal to the optical axis, including a point located downstream of the spherical center C of the lens surface10by k×(RL
L) along the optical axis is employed as a sample observation surface20. This realizes a sample observation method that can observe the image of the sample favorably with a solid immersion lens, and the solid immersion lens.

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