Solid immersion lens and microscope

Details Solid immersion lens and microscope Solid immersion lens and microscope

2004-03-19

2008-09-09

Mack, Ricky L (Department: 2873)

Optical: systems and elements

Lens

Including a nonspherical surface

C359S661000, C359S664000

Reexamination Certificate

active

07423816

ABSTRACT:
A solid immersion lens1comprises a spherical portion2and a bottom surface portion3. The bottom surface portion3is attached in close contact with a substrate10of a semiconductor device to be an observed object. The bottom surface portion3of this solid immersion lens1is formed in a cylindrical shape. Thereby, a solid immersion lens which can be easily separated from the observed object after an observation and can, during an observation, allow a light flux with a high NA to pass and a microscope using the same can be obtained.

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