Solid electrolyte thin film oxygen sensor having thin film heate

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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G01N 2746

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active

041070194

ABSTRACT:
An oxygen sensor made up of an oxygen concentration cell which as a stratiform structure and includes a thin film of an oxygen ion conductive solid electrolyte and a thin layer of a material serving as the source of a reference oxygen partial pressure such as a Ni-NiO system, an electrically nonconductive base plate which supports thereon the cell, and a thin metal layer embedded in the base plate as a resistance heating element for heating the solid electrolyte film.

REFERENCES:
patent: 3871981 (1975-03-01), Flais et al.
patent: 3978006 (1976-08-01), Topp et al.
patent: 4001756 (1977-01-01), Heijne

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