Solenoid/slug gap measurement tool for semiconductor equipment a

Details Solenoid/slug gap measurement tool for semiconductor equipment a Solenoid/slug gap measurement tool for semiconductor equipment a

1992-05-07

1993-10-05

Strecker, Gerard R.

Electricity: measuring and testing

Magnetic

Displacement

156627, 32420724, 324226, G01B 714, H01L 21306

Patent

active

052508978

ABSTRACT:
A tool for measuring a gap between two plates for processing semiconductor wafers is provided. The tool has a solenoid for placement upon a first of the two plates. In the hollow cylinder of the solenoid a slug containing a magnet is mounted so that the slug can slide along the axis of the solenoid. The solenoid is connected to an electric circuit to drive an electrical current therethrough to displace the slug toward and into contact with the second plate. An ammeter measures the current through the solenoid. The measured current corresponds to the slug displacement and yields a measurement of the gap between said two plates.

REFERENCES:
patent: 4849666 (1989-07-01), Hoad
patent: 4907901 (1990-03-01), Mitchell

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