Metal fusion bonding – Process – Metal to nonmetal with separate metallic filler
Patent
1992-10-01
1994-12-13
Ramsey, Kenneth J.
Metal fusion bonding
Process
Metal to nonmetal with separate metallic filler
228 563, 22818022, 228198, 174 84R, H01L 2158
Patent
active
053722957
ABSTRACT:
A solder material comprises a first solder plate and a second solder plate having a thickness equal to or larger than 1 micron provided at the both surfaces of the first solder plate comprising material having a lower melting point than the first solder or material which reacts with the first solder to produce an alloy having a lower melting point than the first solder.
A junctioning method comprises putting the above-described solder material inserted between two objects to be junctioned to each other; heating the solder material to a temperature higher than the melting point of the second solder or the alloy and lower than the melting point of said first solder thereby to melt the second solder or the alloy; and thereafter cooling or keeping the solder material at a temperature in the vicinity of the melting point thereby to junction the objects to be junctioned to each other. The second solder plate has preferably a thickness less than 5 microns and the first solder plate has preferably a thickness equal to or larger than 30 microns. By this construction, the interval between the objects to be junctioned can be controlled to a predetermined thickness and the stress functioning to the objects can be relaxed as well as there arises no positional deviation between the objects.
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Abe Shun-ichi
Asai Katunori
Fukutome Katsuyuki
Ichiyama Hideyuki
Nishinaka Yoshirou
Ramsey Kenneth J.
Ryoden Semiconductor System Engineering Corporation
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