Solar cell manufacturing method

Details Solar cell manufacturing method Solar cell manufacturing method

1995-04-26

1997-09-16

Trinh, Michael

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

136256, 136258, 148DIG3, 438609, H01L 3106

Patent

active

056680503

ABSTRACT:
To efficiently mass-produce back reflectors which are inexpensive and have high reflectivity, the invention provides a manufacturing method for a solar cell comprising at least a metal layer having a texture structure and high reflectivity, a transparent layer, a semiconductor layer, and a transparent electrode which are formed on a substrate, wherein the metal layer consists of at least two layers formed as a first metal layer and a second metal layer. The method includes a step of, after forming the first metal layer, annealing the first metal layer before forming the second metal layer. The invention also provides a solar cell manufacturing apparatus having, upstream of a second metal layer forming chamber, a heating chamber in which the first metal layer can be annealed.

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M. Hirasaka, "Design of Textured Al Electrode for a hydrogenated Silicon Solar Cell", Solar Energy Materials, 20 (1990) 99-110.

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