Solar cell junction processing system

Details Solar cell junction processing system Solar cell junction processing system

1980-11-24

1982-10-12

Weisstuch, Aaron

Metal working

Method of mechanical manufacture

Assembling or joining

136243, 148 15, 2504922, 2504923, H01L 3118

Patent

active

043531601

ABSTRACT:
An integrated system and process for the continuous formation of p-n junctions in solar cells in a cost-effective manner and under computer control. The integrated system essentially comprises an ion beam implanter, an electron beam annealer and a combination vacuum lock-and-wafer transport system, all disposed within a unitary housing maintained under a common vacuum environment.
The integrated system employs no wet chemistry operations and, is characterized by high reproducibility and narrow solar cell performance distribution.

REFERENCES:
patent: 4313254 (1982-02-01), Feldman et al.
A. R. Kirkpatrick, "Low Energy Production Processes in Manufacturing of Silicon Solar Cells" Sharing the Sun--vol. 6, Photovoltaics & Materials, Solar Energy Society of Canada (1976), pp. 67-72.
A. R. Kirkpatrick et al., "Silicon Solar Cells by Ion Implantation and Pulsed Energy Processing", Conf. Record, 12th IEEE Photovoltaic Specialists Conf. (1976), pp. 299-302.
A. R. Kirkpatrick et al., "Production Technology for High Efficiency Ion Implanted Solar Cells", Conf. Record, 13th IEEE Photovoltaic Specialists Conf. (1978), pp. 706-710.
R. O. Bell et al., "Ion Implanted Solar Cells from EFG Silicon Ribbons", Proceedings, 2nd European Photovoltaic Solar Energy Conf. (1979), pp. 153-161.
J. C. Muller et al., "Low Cost Ion Implantation Procedure for the Realization of Silicon Solar Cells in A Continuous Way", Conf. Record, 13th IEEE Photovoltaic Specialists Conf. (1978), pp. 711-716.

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