Solar cell and fabrication thereof using microwaves

Batteries: thermoelectric and photoelectric – Photoelectric – Cells

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29572, 34 4, 34 18, 136256, 136258, 136261, 148 15, 148174, 148175, 148188, 219 1055M, 219 1055R, 357 30, 357 59, 357 65, 427 451, 427 46, H01L 3104, H01G 920, H01L 21225

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042739500

ABSTRACT:
Solar cells are fabricated by spraying a dopant coating onto a semiconductor wafer and heating the surface of the wafer using unipolar microwaves. The resultant controlled heating drives dopant atoms from the coating into the wafer to produce a shallow junction at a selectable depth. Advantageously, metallic conductors are predeposited atop the dopant coating and then sintered to the semiconductor by the same unipolar microwave field concurrently with dopant drive-in. Efficient solar cells can be made with this process using polycrystalline silicon, since with unipolar microwave surface heating the grain boundaries do not become so deeply doped as to short circuit the junctions formed in the individual grains. Unipolar microwave heating also may be used to anneal ion implanted semiconductor devices.

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