Solar cell, a method of producing the same and a semiconductor p

Details Solar cell, a method of producing the same and a semiconductor p Solar cell, a method of producing the same and a semiconductor p

1999-03-19

2000-12-05

Robinson, Ellis

Batteries: thermoelectric and photoelectric

Photoelectric

Cells

136258, H01L 310236

Patent

active

061569682

ABSTRACT:
In preparing a solar cell, minute projections and recesses are uniformly formed in a surface of a single crystal silicon substrate or a polycrystal silicon substrate by dipping in an etching liquid composed of a mixed acid which is composed mainly of a hydrofluoride acid, a nitric acid and a phosphoric acid in addition to a surface active agent. A solar cell having a substrate in which spherical projections and recesses are formed in a surface of it to which light is incident; an apparatus for producing efficiently a solar cell by realizing the above-mentioned process, and a wet etching apparatus to effect stably the above-mentioned process to thereby maintaining a concentration of a nitric acid to be constant, are provided.

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Inomata et al., "Surface Texturing of Large Area Multierystalline Silicon Solar Cells using Reactive Ion Etching Method," Technical Digest, 9.sup.th International Photovoltaic Science and Engineering Conference, Nov. 11-15, 1996, pp. 109-110.
Machida et al., "Development of Low Cost Production Technologies for Polycrystalline Silicon Solar Cells," Technical Digest, 9.sup.th International Photovoltaic Science and Engineering Conference, Nov. 11-15, 1996, pp. 9 102.
H.S. Rauschenbach, "Solar Cell Array Design Handbook", Van Nostrad Reinhold Company, NY, p. 161, 1980.

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