Solar battery having a plurality of I-type layers with different

Details Solar battery having a plurality of I-type layers with different Solar battery having a plurality of I-type layers with different

1998-02-10

2000-08-08

Nguyen, Nam

Batteries: thermoelectric and photoelectric

Photoelectric

Cells

136261, H01L 31075

Patent

active

061004650

ABSTRACT:
In producing a thin film solar battery using a semiconductor film producing apparatus, a semiconductor film is formed on a substrate by glow discharge decomposition. The substrate is transported in a desired direction within a glow discharge space. A substrate heating unit heats the substrate at different temperatures along the desired direction in which the substrate is transported. Consequently, a plurality of semiconductor layers having different hydrogen concentrations are laminated at desired thicknesses with desired characteristics. A glow discharge generating unit generates high frequency power having different frequencies and/or different power outputs along the desired direction in which the substrate is transported.

REFERENCES:
patent: 5571749 (1996-11-01), Matsuda et al.
patent: 5635408 (1997-06-01), Sano et al.
patent: 5676765 (1997-10-01), Saito et al.

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