Sol-gel type synthesis of Bi.sub.2 (Sr,Ta.sub.2)O.sub.9 using an

Details Sol-gel type synthesis of Bi.sub.2 (Sr,Ta.sub.2)O.sub.9 using an Sol-gel type synthesis of Bi.sub.2 (Sr,Ta.sub.2)O.sub.9 using an

1996-08-16

1997-11-04

Bonner, Melissa

Compositions

Piezoelectric

501 12, 501134, 556 28, 556 31, 556 77, 427100, 4271266, 427226, H01L 4100

Patent

active

056836147

ABSTRACT:
A method of forming a layered-perovskite bismuth-strontium-tantalum oxide (SBT) ferroelectric material is performed by dissolving a bismuth compound in a first solvent to form a first solution, mixing a strontium compound and a tantalum compound to form a binary mixture, dissolving the binary mixture in a second solvent to form a second solution, mixing the first solution with the second solution to form a SBT precursor solution, evaporating the first and second solvents to form a SBT precursor material and subsequently sintering said SBT precursor material in the presence of oxygen.

REFERENCES:
patent: 5468679 (1995-11-01), Paz de Araujo et al.
Klee et al, "Sol-Gel and MOD Processing of Layered Perovskite and SrTiO.sub.3 Films", Microelectr. Engin., vol. 29, Jul. 1995, pp. 185-188.
Amanuma et al, "Structural and Ferroelectric Properties of SrBi.sub.2 Ta.sub.2 O.sub.9 Thin Films", Mat. Res. Soc. Symp. Proc., vol. 361, 1995, pp. 21-5 no month.
Chu et al, "Characteristics of Spin-on Ferroelectric SrBi.sub.2 Ta.sub.2 O.sub.9 Thin Film Capacitors for Ferroelectric Random Access Memory Applications", J. Mater. Res., vol. 11(5), May 1996, pp. 1065-1068.
B. A. Tuttle and R. W. Schwartz, Solution Deposition of Ferroelectric Thin Films; Materials Research Society Bulletin, 21(6)49-53 (1996) Jun.
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Hitoshi Watanabe, Takashi Mihara, Hiroyuki Yoshimori and Carlos A. Paz de Araujo, Preparation of Ferroelectric Thin Films of Bismuth Layer Structured Compounds; Jpn. J. Appl. Phys., vol. 34 (1995) Pt. 1, No. 9B, Sep.
Takashi Mihara, Hiroyuki Yoshimori, Hitoshi Watanabe and Carlos A. Paz de Araujo, Characteristics of Bismuth Layered SrBi.sub.2 Ta.sub.2 O.sub.9 Thin-Film Capacitors and Comparison with Pb (Zr, Ti)O.sub.3 ; Jpn. J. Appl. Phys., vol. 34 (1995) pp. 5233-5239, Part 1, No. 9B, Sep. 1995.
C. A-Paz de Araujo, J. D. Cuchiaro, L. D. McMillan, M. C. Scott and J. F. Scott, Fatigue-Free Ferroelectric Capacitors with Platinum Electrodes; Nature, vol. 374, pp. 627-629, 13 Apr. 1995.
Guanghua Yi, Zheng Wu, and Michael Sayer, Preparation of Pb(Zr, Ti)O.sub.3 Thin Films by Sol Gel Processing: Electrical, Optical, and Electro-optic Properties; J. Appl. Phys. 64(5), pp. 2717-2724, 1 Sep. 1988.

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