Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Charge transfer device
Patent
1995-01-13
1996-05-07
Ngo, Ngan V.
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Charge transfer device
257224, 257243, 257347, H01L 27148, H01L 29768
Patent
active
055148859
ABSTRACT:
A charge coupled device is fabricated from a monocrystalline semiconductor-on-insulator (SOI) composite structure.
REFERENCES:
patent: 3383298 (1968-05-01), Wilson et al.
patent: 3906543 (1975-09-01), Smith et al.
patent: 4137625 (1979-02-01), White
patent: 4142925 (1979-03-01), King et al.
patent: 4206470 (1980-06-01), White
patent: 4223234 (1980-09-01), Levine
patent: 4269631 (1981-05-01), Anantha et al.
patent: 4275407 (1981-06-01), Lorenze, Jr.
patent: 4328646 (1982-05-01), Kaganowicz
patent: 4350537 (1982-09-01), Young et al.
patent: 4356384 (1982-10-01), Gat
patent: 4422091 (1983-12-01), Liu
patent: 4461670 (1984-07-01), Celler et al.
patent: 4482393 (1984-11-01), Nishiyama et al.
patent: 4521798 (1985-06-01), Baker
patent: 4564403 (1986-01-01), Hayafuji et al.
patent: 4662949 (1987-05-01), Inoue et al.
patent: 4673475 (1987-06-01), Windischmann
patent: 4704186 (1987-11-01), Jastrzebski
patent: 4751193 (1988-06-01), Myrick
patent: 4778775 (1988-10-01), Tzeng
patent: 4876582 (1989-10-01), Janning
H. J. Leamy et al., "Laser Fabrication of Silicon on Dielectric Substrates", Proceedings of the Materials Research Society Annual Meeting, Boston, Massachusetts, Nov. 16-19, 1981, North-Holland, Amsterdam, Netherlands, pp. 459-504, 1982.
T. Stultz et al., "Beam Processing of Silicon with a Scanning CW Hg Lamp", Mat. Res. Soc. Symp. Proc., vol. 13, pp. 463-476, 1983.
D. Bensahel et al., "Localization of Defects on SOI Films via Selective Recrystallization Using Halogen Lamps", Electron Lett., vol. 19, No. 13, pp. 464-466, Jun. 23, 1983.
T. Xingli et al., "A High Power Vortex Gas Flow Stabilized Flashlamp", Chin. Phys., vol. 4, No. 1, pp. 131-136, Jan.-Mar. 1984.
G. Bagnasco et al., "Two Frequency Self-Injected Flashlamp Pumped Dye Laser for Nonlinear Optics Experiments", IEEE J. Quantum Electron., vol. QE-19, No. 2, pp. 202-208, Feb., 1983.
T. Yunglu, "Generation of UV Picosecond High Power Laser Pulses for Laser-Produced Plasma Diagnosis", Laser J., vol. 9, No. 10, pp. 625-628, Oct. 20, 1982.
J. Jethwa et al., "A Reliable High Average Power Dye Laser", 1977 IEEE/OSA Conference on Laser Engineering and Applications, Jun. 1-3, 1977, vol. QE-13, No. 9, pp. 29-30, Sep. 1977.
F. Kazutaka et al., "Properties of Carbon Films by dc Plasma Deposition", Appl. Phys. Lett. 47(4), Aug. 15, 1985.
L. Holland et al., "The Growth of Carbon Films With Random Atomic Structure From Ion Impact Damage in a Hydrocarbon Plasma", Thin Solid Films, 58, pp. 107-116 (1979).
H. Vora et al., "Structural Investigation of Thin Films of Diamondlike Carbon", J. Appl. Phys., 52(10), pp. 6151-6157 Oct., 1981.
S. Berg et al., "Diamond-like Carbon Films Produced in a Butane Plasma", Thin Solid Films, 58, pp. 117-120 (1979).
D. S. Whitmell et al., "The Deposition of Hard Surface Layers by Hydrocarbon Cracking in a Glow Discharge", Thin Solid Films, 35, pp. 255-261 (1976).
S. Aisenberg et al., "Ion-Beam Deposition of Thin Films of Diamondlike Carbon", J. Appl. Phys. vol. 42, No. 7, pp. 2953-2958, Jun., 1971.
E. G. Spencer et al., "Ion-Beam-Deposited Polycrystalline Diamondlike Films", Appl. Phys. Lett., vol. 29, No. 2, pp. 118-120, Jul. 15, 1976.
T. J. Moravec et al., "Electron Spectroscopy of Ion Beam and Hydrocarbon Plasma Generated Diamondlike Carbon Films", J. Vac. Sci. Technol., 18(2), pp. 226-228, Mar., 1981.
S. Matsumoto et al., "Vapor Deposition of Diamond Particles from Methane", Jpn. J. Appl. Phys., vol. 21, No. 4, pp. L183-L185, Apr., 1982.
B. V. Spitsyn et al., "Vapor Growth of Diamond on Diamond and Other Surfaces", J. Cryst. Growth, 52, pp. 219-226 (1981).
M. Maeda et al., "Amplification of UV Picosecond Pulses by Excimer Lasers", Oyo Buturi, vol. 49, No. 11, pp. 1107-1116, Nov. 1980.
S. Craig et al., "Structure, Optical Properties and Decomposition Kinetics of Sputtered Hydrogenated Carbon", Thin Solid Films, 97, pp. 345-361 (1982).
A. Hiraki et al., "Tetrahedral Carbon Film by Hydrogen Gas Reactive RF-Sputtering of Graphite Onto Low Temperature Substrate", Solid State Commun. vol 50, No. 8, pp. 713-716 (1984).
Dutartre, "In Situ Observation of Lamp Zone Melting of Si Films on Patterned SiO.sub.2 ", Appl. Phys. Letts. 48(5), pp. 350-352, Feb. 3, 1986.
Downer et al., "Ultrafast Heating of Silicon on Sapphire by Femtosecond Optical Pulses", Phys. Rev. Letts., vol. 56, No. 7, 17 Feb. 1986, pp. 761-764.
Seidel et al., "Temperature Transients in Heavily Doped and Undoped Silicon Using Rapid Thermal Annealing", J. Appl. Phys., 57(4), 15 Feb. 1985, pp. 1317-1321.
Scharff et al., "Flash-Lamp-Induced Crystal Growth of Silicon on Amorphous Substrates Using Artificial Surface-Relief Structures", Phys. Stat. Sol. vol. 74a, Dec. 1982, pp. 545-552.
Robinson et al., "Comparison of Thin Film Transistor and SOI Technologies", Materials Research Society Symposia., vol. 33, Feb. 1984, pp. 71-80, ed. Lam et al.
Usami et al., "Flash-Lamp Annealing of Ion-Implanted Silicon and its Application to Solar Cells", IEEE Electron Device Letters, vol. EDL-4, No. 6, Jun. 1983, pp. 166-168.
Cohen et al., "Thermally Assisted Flash Annealing of Silicon and Germanium", Appl. Phys. Letts. 33(8), American Institute of Physics, 15 Oct. 1978, pp. 751-753.
Bomke et al., "Annealing of Ion-Implanted Silicon by an Incoherent Light Pulse", Appl. Phys. Letts. 33(11), 1 Dec. 1978, pp. 955-957.
B. M. Carder et al., "Applying a Compensated Pulsed Alternator to a Flashlamp Load for Nova", 2nd IEEE International Pulsed Power Conference Digest of Technical Papers, Lubbock, Texas, Jun. 12-14, 1979, IEEE, New York, pp. 459-462, 1979.
R. C. Knight et al., "Efficient Burst-Mode Operation of a Very High Repetition Rate Nd: YAG Laser", J. Phys. E., vol. 13, No. 12, pp. 1339-1342. Dec. 1980.
Yukio Saito, Shinpe Matsuda, Shunsuke Nogita, "Synthesis of diamond by decomposition of methane in microwave plasma", Journal of Materials Science Letters 5, (1986): pp. 565-568.
Michael J. Mirtich, Diane M. Swec and John C. Angus, "Dual Ion Beam Deposition of Carbon Films With Diamondlike Properties", NASA Technical Memorandum 83743, (Prepared for Eleventh International Conference on Metallurgical Coatings sponsored by the American Vacuum Society, San Diego, California, Apr. 9-13, 1984): 18 pages.
Joseph Zelez, "A Diamond-Like Carbon Film", RCA Review, vol. 43, (Dec. 1982): p. 665 (Abstract only).
"Scientists discover diamond-film coating process", New York Times News Service, date and page unknown.
L. M. Brown, "Dawn of the diamond chip", Nature, vol. 350, (18 Apr. 1991): pp. 561-562.
John G. Posa, "Galium Arsenide on Silicon: The Growth of Something Big", Semiconductor International (Mar. 1987): p. 36.
S. Prawer, R. Kalish, M. Adel and V. Ritcher, "Effects of heavy ion irradiation on amorphous hydrogenated (diamondlike) carbon films", J. Appl. Phys. 61(9) (1 May 1987) American Institute of Physics: pp. 4492-4500.
S. T. Amimoto, J. S. Whittier, A. Whittaker, A. Chase, R. Hofland, Jr., The Aerospace Corporation, and M. Bass, USC Center of Laser Studies, "Pulsed D.sub.2 -F.sub.2 Chain-Laser Damage to Coated Window and Mirror Components", Source Unknown, (date unknown): pp. 387-396.
G. K. Celler, "Silicon-on-Insulator Films by Oxygen Implantation and Lamp Annealing", Solid State Technology (Mar. 1987): pp. 93-98.
"RTP: On the Edge of Acceptance", Semiconductor International, Edited by Sandra Leavitt (Mar. 1987): 7 pages ending with p. 70.
K. Tsutsui, T. Asano, H. Ishiwara and S. Furukawa, "GaAs-MESFETS Fabricated in SOI Layers on Crystalline Ca.sub.x Sr.sub.1-x F2 Insulator Films", 32.3 (1986 IEEE): pp. IEDM 86-755-758.
John G. Posa, "Uniting Silicon and Gallium Arsenide", High Technology (Mar. 1967): pp. 38-41.
Tom Thompson, "Flashblast--the light that cleans", Popular Science (Jul. 1982): pp. 82-84.
Ken-ichi Kondo and Thomas J. Ahrens, "Shock Compression of Diamond Crystal", Geophysical Research Letters, vol. 10, No. 4, (Apr. 1983): pp. 281-284.
John S. Dickey, Jr., William A. Bassett, John M. Bird and Maura S. Weathers, "Liquid carbon in the lower mantle?", Geology, vol. 11, (Apr. 1983): pp. 219-220.
Francis P. Bundy, "The P, T. Phase and Reaction Diagram for Elemental C
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