Coating apparatus – Projection or spray type – Rotating work
Patent
1998-05-21
2000-04-11
Beck, Shrive
Coating apparatus
Projection or spray type
Rotating work
118 52, 427240, B05C 1102, B05D 312
Patent
active
060483997
ABSTRACT:
A SOG coater nozzle pot includes a pot for containing fluid and letting the fluid in the pot flow out, a funneled nozzle including a wider opening for receiving fluid from the pot and a narrower opening on a protuberance inserted into a duct, and a mounting device for mounting the funneled nozzle on the SOG coater. The nozzle pot according to the invention makes the mounting/dismounting operations of the pot more convenient and less time-consuming. The stability of the SOG coater is maintained as well.
REFERENCES:
patent: 5405443 (1995-04-01), Akimoto et al.
patent: 5562772 (1996-10-01), Neoh
patent: 5763329 (1998-06-01), Kariya
patent: 5788773 (1998-08-01), Okuda et al.
Cheng Ching-Chih
Huang Kuo-Feng
Tan En-Tien
Yang Ming-Che
Beck Shrive
Calcagni Jennifer
United Microelectronics Corp.
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