Software to determine the position of the center of a wafer

Details Software to determine the position of the center of a wafer Software to determine the position of the center of a wafer

1996-05-07

1998-01-06

Elmore, Reba I.

Boots, shoes, and leggings

36446801, 36446817, 36446822, G06F 1900, G06G 764, G06G 766

Patent

active

057062013

ABSTRACT:
A computer program that evaluates data to determine the position of the center of a wafer. The program processes data generated by gate sensors that detect points on the wafer's outer edge. The sensors provide information about a leading and a trailing edge of the wafer. The program then determines if the data points are those on the circular perimeter of the wafer so that points on the flat or notch may be eliminated from the calculation of the center point.

REFERENCES:
patent: 4685206 (1987-08-01), Kobayashi et al.
patent: 4750141 (1988-06-01), Judell et al.
patent: 4752898 (1988-06-01), Koenig
patent: 4819167 (1989-04-01), Cheng et al.
patent: 5238354 (1993-08-01), Volovich
patent: 5511934 (1996-04-01), Bacchi et al.
patent: 5513948 (1996-05-01), Bacchi et al.

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