Soft X-ray source with cylindrical plasma compression

Details Soft X-ray source with cylindrical plasma compression Soft X-ray source with cylindrical plasma compression

1984-08-23

1986-07-22

Anderson, Bruce C.

X-ray or gamma ray systems or devices

Source

31511171, 376145, H01J 3500, H05G 100, H05H 124

Patent

active

046023763

ABSTRACT:
Intense soft X-ray source comprising a means for producing a cylindrical plasma jet between a cathode and an anode, connected to a pulsed high voltage generator, wherein the means for producing the plasma jet comprises

REFERENCES:
patent: 3746860 (1973-07-01), Shatas et al.
patent: 3835330 (1974-09-01), Baker et al.
Baker et al., Electromagnetic-Implosion Generation of Pulsed High-Energy-Density Plasma; J. Appl. Phys. Sep. 1978, vol. 49, #9.
Baikov et al., Visible and Near-UV Emission in the Electrical Explosion of a Thin Metal Foil; Sov. Phys. Tech. Phys. vol. 20, May '75.
Gutcheck et al., Intense Plasma Source for X-ray Microscopy; 196/SPIE vol. 316 High Resolution Soft X-ray Optics (1981).
Pearlman & Riordan; X-ray Lithography Using a Pulsed Plasma Source; 1190 J. Vac. Sci. Technol., 19(4), Nov./Dec. 1981.

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