Soft X-ray mask alignment system

Details Soft X-ray mask alignment system Soft X-ray mask alignment system

1975-10-14

1976-10-05

Smith, Alfred E.

Radiant energy

Coded record and readers; invisible radiant energy type

29579, 250492A, 250505, B01J 1700, G21K 100, G21K 500, G01N 2320

Patent

active

039846806

ABSTRACT:
An alignment system for aligning one or more soft X-ray lithographic masks with respect to a substrate to be exposed in a soft X-ray lithographic apparatus includes alignment marks on the masks and corresponding alignment marks on a substrate, and a means for detecting X-rays emitted from the alignment marks on the substrate.

REFERENCES:
patent: 3588347 (1971-06-01), Montone et al.
patent: 3742229 (1973-06-01), Smith et al.
patent: 3742230 (1973-06-01), Spears et al.
patent: 3743842 (1973-07-01), Smith et al.
patent: 3892973 (1975-07-01), Coquin

Affiliated with

Also associated with

Rating

Soft X-ray mask alignment system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Soft X-ray mask alignment system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Soft X-ray mask alignment system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-656988