Soft X-ray generation apparatus and static elimination...

Details Soft X-ray generation apparatus and static elimination... Soft X-ray generation apparatus and static elimination...

2011-03-15

2011-03-15

Song, Hoon (Department: 2882)

X-ray or gamma ray systems or devices

Source

Electron tube

C378S136000

Reexamination Certificate

active

07907700

ABSTRACT:
The present invention aims to suppress calorific value and prolong a lifetime of an apparatus that generates soft X-rays. Thus, the present invention provides a static elimination apparatus that includes an emitter as an electron emitting portion and a target, in which a thin film formed of diamond particles each having a particle size of 2 nm to 100 nm is formed on a surface of the emitter. The thin film has a diamond XRD pattern in an XRD measurement and, in a Raman spectroscopic measurement, a ratio of an sp3 bonding component to an sp2 bonding component within the film of 2.5 to 2.7:1. When a DC voltage is applied to the emitter, with a threshold electric field intensity of 1 V/μm or less, electrons larger in number than the prior art are emitted from the emitter and moreover, a temperature of the emitter is hardly increased, thus obtaining a longer lifetime.

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