Soft magnetic thin film and thin film magnetic head using same

Stock material or miscellaneous articles – Composite – Of inorganic material

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428 64R, 428 64T, 428 64TS, 428 64TM, 428900, 2041922, 360126, G11B 566

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active

058373926

ABSTRACT:
A soft magnetic thin film according to the present invention can exhibit not only good soft magnetic properties but also an excellent anti-corrosion property, a low magnetostriction, a high saturation magnetic flux density and a high bonding ability to a base plate or substrate. The soft magnetic thin film has a composition of (Fe.sub.a M.sub.b Cu.sub.c Ru.sub.d).sub.e N.sub.f O.sub.g where a, b, c, d, e, f and g represent an atomic % of the respective elements and M represents at least one element selected from the group consisting of Si, Al, Ta, B, Mg, Ca, Sr, Cr, Mn, Zr, Nb, Ti, Mo, V, W, Hf, Ga, Ge and rare earth elements, with the limitations of 0.ltoreq.b.ltoreq.5, 0.ltoreq.c.ltoreq.8, 0.ltoreq.d.ltoreq.5, 0.ltoreq.c+d.ltoreq.8, a+b+c+d=100, 0.5.ltoreq.f.ltoreq.15, 0.1.ltoreq.g.ltoreq.13 and e+f+g=100, the soft magnetic thin film being prepared by reaction-sputtering in which a nitrogen and a steam (H.sub.2 O) are introduced.

REFERENCES:
patent: 5538802 (1996-07-01), Kitaori
patent: 5573863 (1996-11-01), Hayakawa et al.
patent: 5599635 (1997-02-01), Katori

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