Soft magnetic alloy thin film with nitrogen-based amorphous phas

Details Soft magnetic alloy thin film with nitrogen-based amorphous phas Soft magnetic alloy thin film with nitrogen-based amorphous phas

1996-10-29

1998-03-10

Sheehan, John

Metal treatment

Stock

Magnetic

148305, 420128, H01F 1147

Patent

active

057256853

ABSTRACT:
A soft magnetic alloy thin film includes a fine crystalline phase and an amorphous phase. The fine crystalline phase includes an average crystalline grain size of 10 nm or less in diameter and has body-centered cubic structure mainly composed of Fe. The amorphous phase has a nitrogen (N) compound as the main composition and occupies at least 50% of the structure of the thin film. An element M is incorporated at least in the amorphous phase, and includes at least one element selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, W, and rare earth metal elements. A plane-type magnetic device is made using this thin film.

REFERENCES:
patent: 5117321 (1992-05-01), Nakanishi et al.
patent: 5262248 (1993-11-01), Ihara et al.

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