Soft magnetic alloy films

Details Soft magnetic alloy films Soft magnetic alloy films

1992-04-16

1993-11-16

Lewis, Michael

Stock material or miscellaneous articles

All metal or with adjacent metals

Having composition, density, or hardness gradient

428611, 428681, 428928, 428694, 148306, H01F 1147, B32B 514, B32B 1500

Patent

active

052622487

ABSTRACT:
The soft magnetic alloy film of the present invention is not a simple nitride alloy film but incorporates a compositional modulation in which at least the content of nitrogen is periodically modulated in the direction of film thickness after the deposition of the alloy film by a sputtering procedure. Also, the soft magnetic alloy film of the present invention contains a main content of Fe for providing higher saturation magnetization, one or more metals selected from Nb, Ta, Zr, Ti, and Hf, and fine grains of Fe based materials developed after annealing. Therefore, the soft magnetic alloy film of the present invention can exhibit better magnetic properties including higher saturation magnetization and improved soft magnetic characteristics after the annealing and also, ensuring minimum magnetostriction with a specific composition.

REFERENCES:
patent: 4835069 (1989-05-01), Sawada et al.
patent: 4836865 (1989-06-01), Sakakima et al.

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