Soft magnetic alloy film and manufacturing method thereof, and m

Details Soft magnetic alloy film and manufacturing method thereof, and m Soft magnetic alloy film and manufacturing method thereof, and m

1998-09-16

2000-10-17

Kiliman, Leszek

Stock material or miscellaneous articles

Composite

Of inorganic material

428694R, 428694T, 428900, 360113, 324252, 338 32R, 2041912, G11B 566

Patent

active

061328928

ABSTRACT:
A soft magnetic alloy film is essentially consisted of a magnetic alloy having a composition expressed by (Fe.sub.1-a-b Co.sub.a Ni.sub.b).sub.100-X R.sub.X (R is at least one kind of element selected from rare earth elements including Y, 0.ltoreq.a<1, 0 .ltoreq.b<1, 0.ltoreq.a+b<1, 0<x.ltoreq.10 at %). A soft magnetic alloy film has a first phase consisting of a crystal phase, and a second phase different in crystal structure from the first phase. The first phase is composed of crystal phase having, for instance, body-centered cubic structure. The second phase is composed of, for instance, amorphous phase containing R element and/or crystal phase having crystal structure other than body-centered cubic structure containing R element. Since the first phase and the second phase are different each other in their crystal structures, grain growth can be suppressed. Therefore, while maintaining high saturation magnetic flux density which Fe, Fe--Co alloy or Fe--Co--Ni alloy possess, soft magnetic properties can be enhanced. Further, stability of film structure and the like can be heightened.

REFERENCES:
patent: 4567116 (1986-01-01), Sawada
patent: 5466539 (1995-11-01), Takayama
patent: 5496631 (1996-03-01), Tamari
patent: 5573863 (1996-11-01), Hayakawa
patent: 5585196 (1996-12-01), Inomata
patent: 5780177 (1998-07-01), Tomita et al.

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