Soft magnetic alloy film

Details Soft magnetic alloy film Soft magnetic alloy film

1990-02-01

1992-04-14

Sheehan, John P.

Metal treatment

Stock

Magnetic

148306, 148305, 148311, 148315, 420 9, 420 10, 420 13, 420 99, 420125, 420127, H01F 104

Patent

active

051044641

ABSTRACT:
A soft magnetic alloy film has a composition formula expressed by Fex Mz Cw. M is at least one metallic element selected from a group consisting of Ti, Zr, Hf, Nb, Ta, Mo or W, or a mixture of these metallic elements. The composition ratio of x, z and w satisfies the relation expressed by 50 atomic %.ltoreq.x.ltoreq.96 atomic %, 2 atomic %.ltoreq.z.ltoreq.30 atomic %, 0.5 atomic %.ltoreq.w.ltoreq.25 atomic %, and x+z+w=100. The metallic structure of the soft magnetic alloy film basically consists of crystal grains having an average grain size of 0.08 .mu.m or below. The metallic structure contains the crystal phase of carbide of the element M.

REFERENCES:
patent: 4318738 (1982-03-01), Masumoto et al.
patent: 4834814 (1989-05-01), Hasegawa et al.

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